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Micro-Electro-Mechanical
Systems or MEMS is a system consisting
of mechanical elements, sensors, actuators,
and electronic devices on a substrate
(usually silicon) manufactured by micro-fabrication
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LIGA is the German
acronym for lithography (X-ray lithographie)
, electroforming (galvanoformung) and
molding (abformtechnik) ... |
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The Laser-LIGA technology
includes three processes: UV laser irradiation
patterning instead of X-ray lithography,
micro electroforming... |
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High accuracy (submicron
accuracy)
Short turn-around time (the prototyping
time can be as short as 24 hours) |
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Nano technology
represents manufacturing methods and
technologies dealing with nano-scale
dimensions (0.1 micron or 10-7 meter
or less). |
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