By bringing together silicon-based microelectronics with micro-machining technology, MEMS technology makes possible the realization of complete systems-on-a-chip. MEMS is also an enabling technology that allows the development of smart devices or micro-systems by extending the ability of microelectronics with the perception and control capabilities of microsensors and microactuators. MEMS has become the dream of many engineers because it has greatly extended the scope of many designs and applications not thought possible before by traditional manufacturing methods.

Microelectronic integrated circuits can be thought of as the "brains" of a system and MEMS augments this decision-making capability with "eyes" and "arms", to allow microsystems to sense and control the environment. Sensors gather information from the environment through measuring mechanical, thermal, biological, chemical, optical, and magnetic phenomena. The electronics then process the information derived from the sensors and through some decision making capability direct the actuators to respond by moving, positioning, regulating, pumping, and filtering, thereby controlling the environment for some desired outcome or purpose. Because MEMS devices are usually manufactured using batch fabrication techniques similar to those used for integrated circuits, unprecedented levels of functionality, reliability, and sophistication can be placed on a small silicon chip or other substrates at a relatively low cost. The most common applications for MEMS include pressure sensors, MEMS microphones, micro-mirror arrays of DLP, inkjet nozzle heads, RF devices and optical switches.